MEMS behavioral simulation: a potential use for Physics of Failure (PoF) modeling

نویسندگان

  • P. Schmitt
  • F. Pressecq
  • X. Lafontan
  • P. Pons
  • J. M. Nicot
  • C. Oudea
  • D. Estève
  • H. Camon
  • J. Y. Fourniols
چکیده

The reliability of MEMS based systems might be increased by the use of a Physics of Failure (PoF) methodology. This methodology necessitates the development of corresponding models that can be used for reliability evaluation. The model development is based on a good knowledge of effects of environmental influences on the MEMS. For the reliability evaluation of MEMS based systems the used models should be behavioral models. In system simulation behavioral models have a good ratio between simulation time and accuracy. This paper addresses in a first part the PoF methodology and in a second part a case study. The RF switch case study combines the use of environmental tests (temperature variations and irradiation) and modeling tools.

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تاریخ انتشار 2003